Impact of Parameter Variation in Fabrication of Nanostructure by Atomic Force Microscopy Nanolithography
نویسندگان
چکیده
منابع مشابه
Impact of Parameter Variation in Fabrication of Nanostructure by Atomic Force Microscopy Nanolithography
In this letter, we investigate the fabrication of Silicon nanostructure patterned on lightly doped (10(15) cm(-3)) p-type silicon-on-insulator by atomic force microscope nanolithography technique. The local anodic oxidation followed by two wet etching steps, potassium hydroxide etching for silicon removal and hydrofluoric etching for oxide removal, are implemented to reach the structures. The i...
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ژورنال
عنوان ژورنال: PLoS ONE
سال: 2013
ISSN: 1932-6203
DOI: 10.1371/journal.pone.0065409